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Title: An empirical approach for identification of sources of machining errors in ultra-precision raster milling
Authors: To, S 
Wang, H
Li, B
Cheung, CF 
Keywords: Empirical Approach
Source Identification
Sources of Machining Error
Issue Date: 2008
Publisher: Scientific.Net
Source: Key engineering materials, 2008, v. 364-366, pp. 986-991 How to cite?
Journal: Key engineering materials 
Abstract: Ultra-precision raster milling is one of the most significant techniques for the fabrication of high precision components with the surface roughness less than 10nm and form errors less than 0.2 um, without the need for any subsequent polishing. However, no matter how well a machine may be designed, there is a limit to the accuracy that can be achieved. This paper studies the machining errors caused by the diamond tool and the axis motions using Freeform 705G. With an empirical approach, the error sources are separated based on their effects on the surface finish. The main source leading to poor surface finish is identified. This establishes a basis for subsequent error compensation and equipment maintenance.
Description: The Asia Pacific Conference on Optics Manufacture 2007 (APCOM2007), Hong Kong, 11-13 Jan 2007
ISSN: 1013-9826
EISSN: 1662-9795
DOI: 10.4028/
Appears in Collections:Conference Paper

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