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Title: Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
Other Titles: 具有增加的有效电容的柔性电容式微加工超声换能器阵列
Authors: Cheng, CH 
Chao, C
Issue Date: 6-Nov-2013
Publisher: 中华人民共和国国家知识产权局
Source: 中国专利 ZL 201080041013.3 How to cite?
Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) (200) comprises a membrane (220) operatively connected to a top electrode (210) and a bottom electrode having a concave void (230). When a Direct Current (DC) bias voltage is applied, the membrane (220) is deflected towards the bottom electrode so that a peripheral edge region of the membrane (220) is closer to the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane (220) is increased.
Rights: 专利权人: The Hong Kong Polytechnic University.
Appears in Collections:Patent

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