Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/6296
Title: Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
Authors: Cheng, CH 
Chao, C
Issue Date: 10-Sep-2013
Source: US Patent 8,531,919 B2. Washington, DC: US Patent and Trademark Office, 2013. How to cite?
Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased.
URI: http://hdl.handle.net/10397/6296
Rights: Assignee: The Hong Kong Polytechnic University.
Appears in Collections:Patent

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