Strain sensor

Abstract

A strain sensor (10) for measuring strain greater than 10%, the sensor (10) comprising: an upper polydimethylsiloxane (PDMS) substrate (20) having measurement electrodes (90) extending therethrough; a lower PDMS substrate (30) bonded to a lower surface of the upper PDMS substrate (20), and an upper surface of the lower PDMS substrate (30) having a patterned portion (50); and a conductive fluid (70) contained within the patterned portion (50) in contact with the measurement electrodes (90). 本发明涉及一种用于测量大于10％的应变值的应变传感器(10)及其制造方法。所述传感器(10)包括：上PDMS基板(20)，具有延伸穿过所述上PDMS基板的测量电极(90)；下PDMS基板(30)，与所述上PDMS基板(20)的下表面结合，且所述下PDMS基板(30)的上表面具有布线图案部分(50)；以及导电液(70)，容纳所述布线图案部分内并与所述测量电极(90)相接触。