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Title: Robust production capacity planning of a wafer fabrication system with uncertain wafer lots transfer probabilities
Authors: Chen, W
Wang, Z
Chan, FTS 
Issue Date: 2015
Source: The 15th IFAC Symposium on Information Control Problems in Manufacturing (INCOM 2015), Ottawa, Canada, 11-13 May 2015 (CD-ROM) How to cite?
Appears in Collections:Conference Paper

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