Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/592
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dc.contributorDepartment of Applied Physics-
dc.contributorMaterials Research Centre-
dc.creatorOr, DSW-
dc.creatorChan, HLW-
dc.creatorLo, VC-
dc.creatorYuen, CW-
dc.date.accessioned2014-12-11T08:24:31Z-
dc.date.available2014-12-11T08:24:31Z-
dc.identifier.isbn0-7803-3355-1-
dc.identifier.urihttp://hdl.handle.net/10397/592-
dc.language.isoenen_US
dc.publisherIEEEen_US
dc.rights© 1996 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.en_US
dc.rightsThis material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.en_US
dc.subjectBondingen_US
dc.subjectInterferometersen_US
dc.subjectProcess controlen_US
dc.subjectReal time systemsen_US
dc.subjectSensorsen_US
dc.subjectUltrasonic transducersen_US
dc.titleSensors for automatic process control of wire bondingen_US
dc.typeConference Paperen_US
dcterms.abstractPZT sensors were installed on an ultrasonic transducer used for wire bonding in order to record ultrasonic amplitude and bonding time during the bonding process. To find an appropriate location for the sensor placement, the vibration displacement distributions of the transducer were measured using a high frequency heterodyne interferometer. The non-linear signal detected by the PZT sensor was processed and the signatures of the higher frequency harmonics were recorded and related to the bonding quality. The change in harmonic contents and its relation with bond quality will be used to develop a real-time automatic process control system for wire bonding.-
dcterms.accessRightsopen accessen_US
dcterms.bibliographicCitationISAF '96 : proceedings of the tenth IEEE International Symposium on Applications of Ferroelectrics, East Brunswick, NJ, U.S.A., August 18-21, 1996, p. 991-994-
dcterms.issued1996-
dc.identifier.isiWOS:A1996BH95D00219-
dc.identifier.scopus2-s2.0-0030350831-
dc.relation.ispartofbookISAF '96 : proceedings of the tenth IEEE International Symposium on Applications of Ferroelectrics, East Brunswick, NJ, U.S.A., August 18-21, 1996-
dc.description.oaVersion of Recorden_US
dc.identifier.FolderNumberOA_IR/PIRAen_US
dc.description.pubStatusPublisheden_US
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