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Title: Design of micromachined condenser microphones with concave backplates
Authors: Shi, X
Cheng, CH 
Issue Date: 2015
Source: Proceedings of the 19th Annual Conference of Hong Kong Society of Theoretical and Applied Mechanic (HKSTAM) 2015, Hong Kong, 28 Mar 2015, p. 54 How to cite?
Appears in Collections:Conference Paper

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