Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/56677
Title: Formation of Ge nanocrystals in high-k dielectrics for non-volatile memory application by utilizing nanocluster source
Authors: Lee, PF
Lu, XB
Dai, JY 
Chan, HLW 
Issue Date: 2006
Source: The European Materials Research Society (E-MRS 2006) Spring Meeting, Nice, France, 29 May-2 June 2006, p. T-13
Appears in Collections:Conference Paper

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