Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/565
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dc.contributorDepartment of Applied Physics-
dc.contributorMaterials Research Centre-
dc.creatorOr, DSW-
dc.creatorChan, HLW-
dc.creatorLo, VC-
dc.creatorYuen, CW-
dc.date.accessioned2014-12-11T08:28:13Z-
dc.date.available2014-12-11T08:28:13Z-
dc.identifier.issn0885-3010-
dc.identifier.urihttp://hdl.handle.net/10397/565-
dc.language.isoenen_US
dc.publisherInstitute of Electrical and Electronics Engineersen_US
dc.rights© 1998 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.en_US
dc.rightsThis material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.en_US
dc.subjectBondingen_US
dc.subjectPiezoelectric transducersen_US
dc.subjectWire bondingen_US
dc.subjectUltrasonic transducersen_US
dc.titleDynamics of an ultrasonic transducer used for wire bondingen_US
dc.typeJournal/Magazine Articleen_US
dc.identifier.spage1453-
dc.identifier.epage1460-
dc.identifier.volume45-
dc.identifier.issue6-
dc.identifier.doi10.1109/58.738285-
dcterms.abstractThe vibration displacement distributions along a transducer used in ultrasonic wire bonding were measured using a heterodyne interferometer, and many nodes and anti-nodes were found. A mechanical finite element method (FEM) was used to compute the resonant frequencies and vibration mode shapes. The displacement distributions of the dominant 2nd axial mode agreed well with the measured values. Undesirable nonaxial modes, including the higher order flexural and torsional modes, also were excited at frequencies very close to the working frequency (2nd axial mode) of the transducer. Hence, the measured displacements were the resultant of all the allowable modes being excited. However, the excitation of these nonaxial modes were small enough not to affect the formation of consistent and high quality wire bonds. Results of the present study were used to determine a suitable location for installing a piezoelectric sensor to monitor the bond quality.-
dcterms.accessRightsopen accessen_US
dcterms.bibliographicCitationIEEE transactions on ultrasonics, ferroelectrics, and frequency control, Nov. 1998, v. 45, no. 6, p. 1453-1460-
dcterms.isPartOfIEEE transactions on ultrasonics, ferroelectrics, and frequency control-
dcterms.issued1998-11-
dc.identifier.isiWOS:000078031200004-
dc.identifier.scopus2-s2.0-0032208347-
dc.identifier.eissn1525-8955-
dc.description.oaVersion of Recorden_US
dc.identifier.FolderNumberOA_IR/PIRAen_US
dc.description.pubStatusPublisheden_US
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