Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/55743
Title: Multiscale modeling of thin-film deposition : applications to Si device processing
Authors: Baumann, F
Chopp, D
Diaz De La Rubia, T
Gilmer, G
Greene, J
Huang, H
Kodambaka, S
Osullivan, P
Petrov, I
Issue Date: 2001
Publisher: Cambridge University Press
Source: MRS bulletin, 2001, v. 26 , no. 3, p. 182-189 How to cite?
Journal: MRS bulletin 
URI: http://hdl.handle.net/10397/55743
ISSN: 0883-7694 (print)
1938-1425 (online)
Appears in Collections:Journal/Magazine Article

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