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Title: High-pressure sensor based on fiber in-line Mach-Zehnder interferometer
Authors: Talataisong, W
Wang, DN 
Chitaree, R
Liao, CR
Wanga, C
Keywords: Femtosecond laser micromachining
Fiber in-line interferometer
Pressure sensors
Issue Date: 2015
Publisher: SPIE-International Society for Optical Engineering
Source: Proceedings of SPIE : the International Society for Optical Engineering, v. 9634, 96345B How to cite?
Journal: Proceedings of SPIE : the International Society for Optical Engineering 
Abstract: A fiber in-line Mach-Zehnder interferometer based on an inner air-cavity is presented for high-pressure measureement. The inner air-cavity is fabricated by use of femtosecond laser micromachining together with fusion splicing technique. A micro-channel is created on the top of the inner air-cavity to allow the high pressure gas to flow in. The fiber in-line device is featured with miniature size, good robustness and excellent operation stability while exhibiting a high pressure sensitivity of 8,239 pm/MPa.
ISBN: 9781628418392
ISSN: 0277-786X
EISSN: 1996-756X
DOI: 10.1117/12.2190520
Appears in Collections:Conference Paper

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