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Title: Control of feature development on elastomer surface during plasma ion implantation by surface prepatterning
Authors: Sun, Y
Leung, CW 
Issue Date: 2012
Source: 38th International Micro & Nano Engineering Conference (MNE 2012), Toulouse, France, 16-20 September 2012, p. 20 How to cite?
Appears in Collections:Conference Paper

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