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Title: Ferroelectric and piezoelectric properties of Pb(Zr,Ti)O3 thin films integrated on SOI wafers
Authors: Wang, Y 
Lam, TY
Cheng, YL
Liu, WL
Song, ZT
Chan, HLW 
Choy, CL 
Issue Date: 2004
Source: The 16th International Symposium on Integrated Ferroelectrics, Gyeongju, Korea, 5-8 April 2004, p. W-2-19-P
Appears in Collections:Conference Paper

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