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Title: Double beam laser interferometer to measure piezoelectric displacements for elimination of substrate effect in thin films
Authors: Shi, BX
Huang, A
Chan, HLW 
Issue Date: 2002
Source: The Second International Symposium on Instrumentation Science and Technology, Jinan, China, 18-22 August 2002, p. 342-346
Appears in Collections:Conference Paper

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