Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/44036
Title: Arbitrary and parallel nanofabrication of 3D metal structures with polymer brush resists
Authors: Chen, C
Xie, Z
Wei, X
Zheng, Z 
Keywords: 3D patterns
Metal structures
Nanofabrication
Polymer brushes
Scanning probe lithography
Issue Date: 2015
Publisher: Wiley-VCH
Source: Small, 2015, v. 11, no. 45, p. 6013-6017 How to cite?
Journal: Small 
Abstract: 3D polymer brushes are reported for the first time as ideal resists for the alignment-free nanofabrication of complex 3D metal structures with sub-100 nm lateral resolution and sub-10 nm vertical resolution. Since 3D polymer brushes can be serially fabricated in parallel, this method is effective to generate arbitrary 3D metal structures over a large area at a high throughput.
URI: http://hdl.handle.net/10397/44036
ISSN: 1613-6810
EISSN: 1613-6829
DOI: 10.1002/smll.201500796
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