Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/43890
Title: Analyzing the applicability of miniature ultra-high sensitivity Fabry-Perot acoustic sensor using a nanothick graphene diaphragm
Authors: Li, C
Gao, X
Guo, T
Xiao, J
Fan, S
Jin, W 
Keywords: Acoustic pressure sensor
Fabry-perot interference
Graphene diaphragm
Ultra-high sensitivity
Issue Date: 2015
Publisher: Institute of Physics Publishing
Source: Measurement science and technology, 2015, v. 26, no. 8, 085101 How to cite?
Journal: Measurement science and technology 
Abstract: A miniature Fabry-Perot interferometric acoustic sensor with an ultra-high pressure sensitivity was constructed by using approximately 13 layers of graphene film as the diaphragm. The extremely thin diaphragm was transferred onto the endface of a ferrule, which had an inner diameter of 125 μm, and van der Waals interactions between the graphene diaphragm and its substrate created a low finesse Fabry-Perot interferometer with a cavity length of 98 μm. Acoustic testing demonstrated a pressure-induced deflection of 2380 nm kPa-1 and a noise equivalent acoustic signal level of ∼2.7 mPa/Hz1/2 for a 3 dB bandwidth with a center frequency of 15 kHz. The sensor also exhibited a dynamic frequency response between 1 and 20 kHz, which conformed well to the result obtained by a reference microphone. The use of a suspended graphene diaphragm has potential applications in highly sensitive pressure/acoustic sensors.
URI: http://hdl.handle.net/10397/43890
ISSN: 0957-0233
EISSN: 1361-6501
DOI: 10.1088/0957-0233/26/8/085101
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