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Title: New multichamber evaporator for organic devices
Authors: Wang, QL
Guo, WL
Chan, MCY
Liu, SC
Li, EH
Surya, C 
Keywords: Data storage
Organic light emitting diodes
Organic materials
Plasma treatment
Thin films
Issue Date: 2000
Publisher: SPIE-International Society for Optical Engineering
Source: Proceedings of SPIE : the International Society for Optical Engineering, 2000, v. 4078, 289 How to cite?
Journal: Proceedings of SPIE : the International Society for Optical Engineering 
Abstract: A new four vacuum chamber evaporator for organic devices was proposed and specially designed. The chamber one is for ITO/glass pretreatment, it's have ozone treatment and plasma treatment. The chamber two is used for organic thin film evaporating. There has six sources for organic material, and three power sources can work at the same time, there is a mask storage chamber in the organic evaporation chamber, so for some material research, you can get three kind of doping density of thickness OLED at the same fabrication. The chamber three is a vacuum glove box. It's used for package. The chamber four is used for cathode evaporating, it can evaporates Mg, Ag, LfF, Ca, Al, Au.
Description: Conference on Optoelectronic Materials and Devices II, Taipei, Taiwan, July 2000
ISSN: 0277-786X
EISSN: 1996-756X
DOI: 10.1117/12.392153
Appears in Collections:Conference Paper

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