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Title: Micromachining pressure sensors on optical fiber tip
Authors: Zhang, XM 
Yu, M
Bae, H
Christian, A
Liu, AQ
Keywords: Fiber optic sensor
Low coherence interferometry
Micro machining
Pressure sensor
Issue Date: 2009
Source: International Conference on Materials for Advanced Technologies 2009 and International Union of Materials Research Societies - International Conference in Asia 2009 (Symposium L - NEMS/MEMS Technology and Devices), Singapore, 28 June 2009 - 3 July 2009, p. 54 How to cite?
ISSN: 1662-8985
Appears in Collections:Conference Paper

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