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Title: Influence of resistivity of silicon substrate on BST/Si-based phase shifters
Authors: Chen, XJ
Wong, SL
Zhou, XY
Zhang, YY
Wang, Y 
Chan, HLW 
Issue Date: 2007
Source: 19th International Symposium of Integrated Ferroelectrics (ISIF 2007), Bordeaux, France, 8-11 May 2007, p. 5
Appears in Collections:Conference Paper

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