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http://hdl.handle.net/10397/38958| Title: | Preparation and piezoelectric properties of sol-gel derived niobium-doped lead zirconate titanate films for MEMS applications | Authors: | Kwok, KW Kwok, KP Tsang, RCW Chan, HLW Choy, CL |
Issue Date: | 2005 | Source: | The 17th International Symposium on Integrated Ferroelectrics (ISIF 2005), Shanghai, China, 17-20 April 2005, p. 5-27-P How to cite? | URI: | http://hdl.handle.net/10397/38958 |
| Appears in Collections: | Conference Paper |
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