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Title: Design of micromachined condenser microphone with concave backplate and comparison with flat backplate microphone
Authors: Shi, X
Cheng, CH 
Issue Date: 2014
Source: 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Honolulu, Hawaii, USA, 13-16 April 2014 How to cite?
Appears in Collections:Conference Paper

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