Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/38059
Title: Spurious wave suppression in BAW resonators with frame-like airgap
Authors: Yang, WX
Tam, WY 
Keywords: Acoustic resonators
Air gaps
Bulk acoustic wave devices
Electrodes
Finite difference time-domain analysis
Issue Date: 2010
Source: IEEE International Frequency Control Symposium (FCS'2010), Newport Beach, CA, 1-4 June 2010, p. 656-660 (CD) How to cite?
Abstract: In this paper, a new membrane resonator structure for suppressing the spurious waves is proposed. The proposed structure consists of a piezoelectric slab sandwiched between the bottom electrode with a frame-like airgap and a solid top electrode. The finite-difference time-domain (FDTD) method is applied to extract the displacements to illustrate the reduction of spurious waves.
URI: http://hdl.handle.net/10397/38059
ISBN: 978-1-4244-6399-2
DOI: 10.1109/FREQ.2010.5556248
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