Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/38053
Title: Low cost displacement sensor at sub-micron precision based on 3×3 optical coupler for vibrating surface
Authors: Chow, HW
Cheung, N 
Keywords: Component
Displacement sensor
Interference
Interferometer
Sub-micron precision
Issue Date: 2009
Source: IEEE International Conference on Mechatronics : ICM 2009 : Malaga, Spain, 14-17 April 2009, p. 1-6 (CD) How to cite?
Abstract: A high precision displacement sensor is proposed in this paper. This sensor based on 3times3 optical coupler and analog circuits is linear incremental encoder type. Outputs of optical coupler are processed by analog circuits and generate displacement information. Low cost and high precision are main advantages of this sensor and analog circuits could enhance the maximum measurable velocity compared with digital signal processor (DSP). The resolution of this proposed sensor depends on wavelength of laser lambda and the resolution is lambda/16 = 95.5 nm. The error deviation is 1mum, which is measured during experiment.
URI: http://hdl.handle.net/10397/38053
ISBN: 978-1-4244-4194-5
978-1-4244-4195-2 (E-ISBN)
DOI: 10.1109/ICMECH.2009.4957136
Appears in Collections:Conference Paper

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