Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/36073
Title: Transparent conductive and infrared reflective AZO/Cu/AZO multilayer film prepared by RF magnetron sputtering
Authors: Miao, DG
Jiang, SX 
Shang, SM 
Zhao, HM
Chen, ZM
Issue Date: 2014
Publisher: Springer
Source: Journal of materials science : materials in electronics, 2014, v. 25, no. 12, p. 5248-5254 How to cite?
Journal: Journal of materials science : materials in electronics 
Abstract: AZO/Cu/AZO multilayer films were prepared on glass substrate by radio frequency magnetron sputtering technology. The prepared films were investigated by a four-point probe system, X-ray diffraction, optical transmittance spectra, scanning electron microscope, atomic force microscopy and Fourier transform infrared spectroscopy. The results showed that Cu inner layer started forming a continuous film at the thickness around 11 nm. The prepared AZO/Cu/AZO samples exhibited the visible transmittance of 60-80 % and sample with 15 nm Cu inner layer showed the highest infrared reflection rate of 67 % in FIR region and the lowest sheet resistance of 16.6 Omega/sq. The proper visible transmittance and infrared reflection property of the AZO/Cu/AZO multilayer film make it a promising candidate for future energy conservation materials.
URI: http://hdl.handle.net/10397/36073
ISSN: 0957-4522
EISSN: 1573-482X
DOI: 10.1007/s10854-014-2297-0
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