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Title: A study of pattern and feature analysis of surface generation in fast tool servo machining of optical microstructures
Authors: Cheung, CF 
Jiang, XQ
To, S 
Lee, WB 
Kwok, TC
Li, HF
Keywords: Fast tool servo machining
Optical microstructures
Pattern and feature analysis
Surface characterization
Surface generation
Issue Date: 2006
Source: Proceedings of the 21st Annual ASPE Meeting, ASPE 2006, 2006 How to cite?
Abstract: Nowadays, there are lack of definitive international standards, surface parameters and techniques for the characterisation of the surface generation of optical microstructures with the articulation to their quality specifications in practical applications. This paper presents a study of factors affecting the surface generation in FTS machining of optical microstructures. The surface quality and defects of the machined surfaces are examined by a non-contact interferometric surface profiler. Surface features and patterns are analysed based on power spectrum analysis and are correlated with the surface quality of the optical microstructures. The results form the basis for the development of the pattern and feature analysis algorithms for the characterisation of surface generation in FTS machining of optical microstructures.
Description: 21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006, Monterey, CA, 15-20 October 2006
ISBN: 1887706410
Appears in Collections:Conference Paper

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