Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/32909
Title: Fabrication and characterization of ZnO-based film bulk acoustic resonator with a high working frequency
Authors: Zhang, T
Wang, Y 
Liu, WL
Cheng, JG
Song, ZT
Feng, SL
Chan-Wong, LWH 
Choy, CL 
Issue Date: 2005
Publisher: Chinese Physical Society
Source: Chinese physics letters, 2005, v. 22, no. 3, p. 694-696 How to cite?
Journal: Chinese physics letters 
Abstract: We report on the fabrication and characterization of a ZnO-based film-bulk acoustic-resonance device utilized as biosensor. The device has a multilayer structure which consists of piezoelectric element (Au/ZnO/Pt) and a Bragg-reuection-layer acoustic isolation consisting of multilayers of ZnO/Pt. Dielectric measurements have revealed that the device has a very high working frequency (up to ∼3.1 GHz), meaning that the device may have a higher sensitivity than the devices reported in the literature.
URI: http://hdl.handle.net/10397/32909
ISSN: 0256-307X
EISSN: 1741-3540
DOI: 10.1088/0256-307X/22/3/048
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