Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/32764
Title: Heteroepitaxial growth of high K dielectric thin films by pulsed laser deposition
Authors: Yu, WM
Wong, KH
Keywords: Dielectric constant
Dielectric loss
Leakage current density
Pulsed laser deposition
Split-target
X-ray diffraction
Issue Date: 2003
Publisher: Taylor & Francis
Source: Integrated ferroelectrics, 2003, v. 55, p. 947-954 How to cite?
Journal: Integrated ferroelectrics 
Abstract: High K dielectric [Pb(Mg 1/3Nb 2/3)O 3] 1-x-[PbTiO 3] x (PMN 1-x-PT x) thin films and conducting La 0.7Sr 0.3MnO 3 (LSMO) oxide electrodes were deposited on LaAlO 3 (LAO) (100) single crystal substrates by pulsed laser deposition. A novel "splittarget" technique was used to fabricate films with x = 0.00,0.10,0.35,0.53 and 1.00. Conditions for depositing high quality films were studied. The structural characteristics of the PMN 1-x-PT x/LSMO/LAO heterostructures were examined by X-ray diffraction and scanning electron microscopy. A cube-on-cube epitaxy was obtained for films grown at 650°C and under an oxygen ambient pressure of 200 mTorr. Electrical measurement was performed with 0.2 mm diameter patterned Au top electrodes. The dielectric constant and dielectric loss of the PMN 1-x-PT x films were studied as functions of frequency and temperature for x = 0.10 and 0.35. All films grown at 650°C showed small leakage current density of below 10 -7 Acm -2 at 1 V.
URI: http://hdl.handle.net/10397/32764
ISSN: 1058-4587
EISSN: 1607-8489
DOI: 10.1080/10584580390259416
Appears in Collections:Journal/Magazine Article

Access
View full-text via PolyU eLinks SFX Query
Show full item record

SCOPUSTM   
Citations

2
Last Week
0
Last month
0
Citations as of Aug 17, 2017

WEB OF SCIENCETM
Citations

2
Last Week
0
Last month
0
Citations as of Aug 13, 2017

Page view(s)

27
Last Week
1
Last month
Checked on Aug 13, 2017

Google ScholarTM

Check

Altmetric



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.