Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/30860
Title: Capacitive micromachined ultrasonic transducers (CMUTs) with isolation posts
Authors: Huang, Y
Zhuang, X
Haeggstrom, EO
Ergun, AS
Cheng, CH 
Khuri-Yakub, BT
Issue Date: 2008
Source: Ultrasonics, 2008, v. 48, no. 1, p. 74-81
Abstract: In this paper, an improved design of a capacitive micromachined ultrasonic transducer (CMUT) is presented. The design improvement aims to address the reliability issues of a CMUT and to extend the device operation beyond the contact (collapse) voltage. The major design novelty is the isolation posts in the vacuum cavities of the CMUT cells instead of full-coverage insulation layers in conventional CMUTs. This eliminates the contact voltage drifting due to charging caused by the insulation layer, and enables repeatable CMUT operation in the post-contact regime. Ultrasonic tests of the CMUTs with isolation posts (PostCMUTs) in air (electrical input impedance and capacitance vs. bias voltage) and immersion (transmission and reception) indicate acoustic performance similar to that obtained from conventional CMUTs while no undesired side effects of this new design is observed.
Keywords: Charging
CMUT
Hysteresis
Isolation posts
Reliability
Transducer
Ultrasound
Publisher: Elsevier
Journal: Ultrasonics 
ISSN: 0041-624X
EISSN: 1874-9968
DOI: 10.1016/j.ultras.2007.11.006
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