Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/29968
Title: Processing and characterization of micromachined actuators based on proton-irradiated P(VDF-TrFE) copolymer
Authors: Lau, ST
Chan, HLW 
Choy, CL
Cheung, WY
Wong, SP
Keywords: Actuator
Irradiation
Membrane
MEMs
P(VDF-TrFE)
Issue Date: 2005
Publisher: Taylor & Francis
Source: Integrated ferroelectrics, 2005, v. 69, p. 375-382 How to cite?
Journal: Integrated ferroelectrics 
Abstract: Copolymers of vinylidene fluoride and trifluoroethylene (P(VDF-TrFE)) have been used in a variety of devices such as transducers, actuators and sensors because of their good electroactive properties. Our earlier work showed that the electric field-induced strain in P(VDF-TrFE) copolymers can be enhanced significantly after high energy proton irradiation. In this study, micromachined actuators using proton-irradiated P(VDF-TrFE) copolymer as the active element have been fabricated. P(VDF-TrFE) 70/30 mol% copolymer film with a thickness of ∼ 3.3 μm was spin-coated on a silicon (Si) substrate. After etching the Si substrate by bulk micromachining, an actuator in the form of a suspended membrane was obtained. High energy proton irradiation with a dose of 107 Mrad was carried out to modify the properties of the copolymer film. The resonance characteristics of the actuators based on these irradiated copolymer films were studied and the displacement induced in the actuators was measured using a laser vibrometer, These types of polymer-based micromechanical systems have the advantages of being lightweight and have high toughness, thereby reducing the risk of breakage. By applying different d.c. bias voltages, the magnitude of the displacement induced in the actuator can be varied.
Description: 16th International Symposium on Integrated Ferroelectrics, ISIF-16, Gyeongju, 5-8 April 2004
URI: http://hdl.handle.net/10397/29968
ISSN: 1058-4587
EISSN: 1607-8489
DOI: 10.1080/10584580590899414
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