Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/29938
Title: Highly transparent and infrared reflective AZO/Ag/AZO multilayer film prepared on PET substrate by RF magnetron sputtering
Authors: Miao, D
Jiang, S 
Shang, S 
Chen, Z
Keywords: AZO/Ag/AZO
Flexible solar films
Infrared reflection
RF magnetron sputtering
Issue Date: 2014
Publisher: Pergamon-Elsevier Science Ltd
Source: Vacuum, 2014, v. 106, p. 1-4 How to cite?
Journal: Vacuum 
Abstract: AZO/Ag/AZO multilayer films were prepared on PET substrate by radio frequency (RF) magnetron sputtering technology. The prepared films were investigated by optical transmittance spectra, a four-point probe system, X-ray Diffraction (XRD), Scanning Electron Microscope (SEM), Atomic Force Microscopy (AFM), and Fourier Transform Infrared Spectroscopy. The results indicate that Ag inner layer starts forming a continuous film at the thickness about 10 nm. The sample with 10 nm's Ag inner layer exhibited the highest average visible transmittance of 78.5% and 91%'s infrared reflection rate in FIR region. Sample with 15 nm's Ag inner layer showed the highest infrared reflection rate of 96% in FIR region. The high visible transmittance and infrared reflection property of the AZO/Ag/AZO multilayer film makes it a promising candidate for solar films.
URI: http://hdl.handle.net/10397/29938
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2014.02.021
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