Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/29646
Title: In-doped transparent and conducting cubic magnesium zinc oxide thin films grown by pulsed laser deposition
Authors: Lau, CH
Zhuang, L
Wong, KH
Issue Date: 2007
Publisher: Wiley-V C H Verlag Gmbh
Source: Physica status solidi (b) basic research, 2007, v. 244, no. 5, p. 1533-1537 How to cite?
Journal: Physica Status Solidi (B) Basic Research 
Abstract: In-doped n-type semiconducting magnesium zinc oxide (MZO) thin films have been fabricated on MgO (100) and LaAlO3 (LAO) (100) substrates under low oxygen ambient by pulse laser deposition (PLD). X-ray diffraction and HRTEM studies reveal the presence of pure cubic phase MZO (c-MZO). High quality cube-on-cube epitaxy is obtained in films grown on MgO. For films deposit on LAO, they exhibit heteroepitaxial relationship of (100)c-MZO ?? (100)LAO and (011)c-MZO?? (010)LAO. All as-prepared c-MZO thin films show good optical transmittance over the whole visible spectrum. Samples with In dopant concentration above 8 at% yield an electrical resistivity of less than 10-2 ?[ cm and can be used as Transparent Conducing Oxide (TCO).
URI: http://hdl.handle.net/10397/29646
ISSN: 0370-1972
DOI: 10.1002/pssb.200675129
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