Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/29577
Title: Feasibility of the 248 nm Excimer laser in the laser structuring of fine circuit lines on printed circuit board
Authors: Zhang, B
Yung, KC 
Keywords: Excimer laser
Laser structuring
Mask
Issue Date: 2007
Publisher: Springer
Source: International journal of advanced manufacturing technology, 2007, v. 33, no. 11-12, p. 1149-1158 How to cite?
Journal: International journal of advanced manufacturing technology 
Abstract: Excimer laser (KrF) is used as a new laser source to determine its feasibility in the laser structuring process. Compared with frequency-tripled Nd:YAG lasers, the Excimer laser can conveniently change the spot size of a laser beam to get a smaller sized circuit line/space by inserting a mask. Some frequently used laser parameters of the Excimer laser are discussed in this paper, such as laser energy, number of repetition, repetition rate, bite size and laser beam size. The differences between the Nd:YAG laser and the Excimer laser in laser structuring are also explored in this paper.
URI: http://hdl.handle.net/10397/29577
ISSN: 0268-3768
EISSN: 1433-3015
DOI: 10.1007/s00170-006-0564-9
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