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Title: Preparation of 3D 256 element PCLT/P(VDF-TrFE) infrared array
Authors: Li, J
Yuan, N
Chan, HLW 
Issue Date: 2002
Source: Integrated ferroelectrics, 2002, v. 49, p. 295-304
Abstract: A 256(16 × 16) element infrared array was integrated by 3-dimensional CMOS technology. 0-3 nanocomposite thin film consisting of nanosized calcium and lanthanum doped lead titanate (PCLT) powder dispersed in a vinylidene fluoride-trifluoroethylene [P(VDF-TrFE)] matrix with 0.16 volume fraction of PCLT was used as the sensing element. PMOSFETs and two 16-bits shift registers were used as the impedance converter and address selection of the elements, respectively. The thermal insulation layer was a 6 μm polyimide film and the absorption layer was a 40 nm Ni-Cr layer. The specific detectivity was 2.6E7cmHz1/2W-1 as tested by using a black body infrared source.
Keywords: PCLT/P(VDF-TrFE) composite film
Pyroelectric sensors
Two dimensional integrated array
Publisher: Taylor & Francis
Journal: Integrated ferroelectrics 
ISSN: 1058-4587
EISSN: 1607-8489
DOI: 10.1080/10584580215487
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