Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/27860
Title: Micromachined piezoelectric polymer membrane acoustic sensor
Authors: Lam, TY
Lam, KH
Chan, HLW 
Keywords: MEMS
P(VDF-TrFE)
Vibrating membrane
Issue Date: 2005
Source: Integrated ferroelectrics, 2005, v. 76, p. 31-37 How to cite?
Journal: Integrated Ferroelectrics 
Abstract: This paper reports on a 2.3 mm × 2.3 mm polymer micro- electromechanical systems (MEMS) for air transducer applications. The MEMS, used as a receiver of ultrasonic signal, has a suspended membrane structure. A 2.7 μm thick poly(vinylidene fluoridetrifluoroethylene) [P(VDF-TrFE)] 70/30 mol% copolymer was spun on a silicon dioxide/silicon substrate and then poled in-situ. The Si substrate was then etched from the backside by anisotropic chemical etching in KOH to produce a P(VDF-TrFE)/SiO2/Si suspended membrane structure. The displacement of the membrane was measured by means of a laser vibrometer. The maximum deflection at the center of the membrane was 0.9 μm at 40.8 kHz under an input drive of 7 V. A commercial air transducer was used as the transmitter to emit ultrasound at 40.8 kHz. The MEMS acoustic transducer, which has similar resonance frequency, was used as the receiver. The temporal response of the MEMS and its sensitivity were measured. The result suggested that the MEMS has potential for monitoring ultrasound emission.
Description: Seventeenth International Symposium on Integrated Ferroelectrics, ISIF-17, Shanghai, 17-20 April 2005
URI: http://hdl.handle.net/10397/27860
ISSN: 1058-4587
DOI: 10.1080/10584580500413418
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