Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/27326
Title: Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications
Authors: Yan, Z
Song, Z
Liu, W
Ren, H
Gu, N
Zhou, X
Zhang, L
Wang, Y 
Feng, S
Lai, L
Chen, J
Keywords: Mass sensor
Resonator
Sputtering
ZnO film
Issue Date: 2007
Publisher: North-Holland
Source: Applied surface science, 2007, v. 253, no. 24, p. 9372-9380 How to cite?
Journal: Applied surface science 
Abstract: Zinc oxide based film bulk acoustic resonator as mass sensor was fabricated by multi-target magnetron sputtering under optimized deposition condition. Each layer of the device was well crystallized and highly textural observed by transmission electron microscopy and X-ray diffraction measurement. Through piezoelectric test, the device vibrated with significant distance. The influence of top electrode on resonant frequency and the bio-specimen of mass loading effect were investigated. Data show that the device has qualified properties as mass biosensor, with a resonant frequency of 3-4 GHz and a high sensitivity of 8-10 kHz cm 2/ng.
URI: http://hdl.handle.net/10397/27326
ISSN: 0169-4332
EISSN: 1873-5584
DOI: 10.1016/j.apsusc.2007.05.081
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