Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/27180
Title: Preparation and structure dependence of H2 sensing properties of palladium-coated tungsten oxide films
Authors: Zhao, M
Huang, J
Ong, CW 
Keywords: Grain size
H2 sensing
Palladium-coated tungsten oxide
Porosity
Roughness
Issue Date: 2013
Publisher: Elsevier
Source: Sensors and actuators. B, Chemical, 2013, v. 177, p. 1062-1070 How to cite?
Journal: Sensors and actuators. B, Chemical 
Abstract: This study aims at revealing and explaining the influences of preparation condition on the structure and subsequent hydrogen (H2) sensing properties of palladium-(Pd-) coated tungsten oxide (WO3) films. The material structure was specified by grain size; porosity, surface roughness and thickness of the WO3 layer; and thicknesses of the Pd coating. The structural parameters are found to be tailorable in broad ranges by applying supersonic cluster beam deposition or magnetron sputtering technique operating at various substrate temperatures (50-550°C) and 20% Ar-80% O2 pressures (3-60 mTorr). The H2 sensing response of the sensors, and their response time (trespond) for hydrogenation and recovery time (trecover) for dehydrogenation are detected and found to be adjustable in a comprehensive manner. Results indicate that Pd/WO3 hydrogen sensors of high sensor response and short trespond and trecover are achievable if the WO3-based sensor is made to be highly disordered or contain non-crystalline clusters of size ≤5 nm, and have a porosity ≥14%. More details on possible mechanisms responsible for the findings are discussed.
URI: http://hdl.handle.net/10397/27180
ISSN: 0925-4005
EISSN: 1873-3077
DOI: 10.1016/j.snb.2012.12.011
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