Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/26026
Title: An investigation of form compensation in fabricating microlens arrays by ultra-precision fast-tool-servo technology
Authors: Kwok, TC
To, S 
Cheung, CF 
Wang, SJ
Lee, WB 
Keywords: Fast tool servo
Form accuracy
Microlens arrays
Optimal cutting conditions
Surface roughness
Tool compensation
Ultra-precision machining
Issue Date: 2006
Publisher: Trans Tech Publications Ltd
Source: Materials science forum, 2006, v. 532-533, p. 689-692 How to cite?
Journal: Materials science forum 
Abstract: Microlens arrays are widely used as critical components in a large number of photonics and telecommunication products. The increasing demand for high-tech products provides an expanding room for the development of the micro-fabrication technology. This study presents a tool compensation for correcting the form error of fabricated microlenses in ultra-precision machining with fast-tool-servo (FTS) system. After presentation of optimal cutting conditions deduced on the basis of cutting experiments of microlens arrays, a tool radius compensation method will be proposed and evaluated in this paper. This methodology makes use of form measurement data from a Form Talysurf system to modify the C program employed in the software of ultra-precision machining FTS system - SOP. The form error was successfully reduced after implementation of tool compensation.
Description: 12th International Manufacturing Conference in China, IMCC2006, Xi'an, 21-23 September 2006
URI: http://hdl.handle.net/10397/26026
ISBN: 0878494219
9780878494217
ISSN: 0255-5476
EISSN: 1662-9752
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