Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/25289
Title: Thick PZT films deposited on stainless steel substrates coated with barrier layers
Authors: Li, K
Lee, KW
Chan, HLW 
Choy, CL
Keywords: Piezoelectric
PZT
Thick film
Issue Date: 2001
Publisher: Taylor & Francis Inc.
Source: Ferroelectrics, 2001, v. 252, no. 1-4, p. 461-467 How to cite?
Journal: Ferroelectrics 
Abstract: A mixture of lead zirconate titanate (PbZr 0.52Ti 0.48O 3, PZT) powder and PZT solution was deposited on a stainless steel substrate previously coated with a barrier layer to give a film of thickness 20-40 μm. A single layer of thickness 3 ∼ 5 μm could be prepared by using a mixture of 1.2 M PZT solution and PZT powder in a molar ratio of 1:1. Multiple layers were deposited in order to achieve the desired film thickness. The 4-6 μm thick barrier layer blocks the inter-diffusion of ions through the PZT/steel interface. X-ray diffraction measurements show that the film has a pure perovskite structure. The ferroelectric and piezoelectric properties of a 20 μm thick PZT film were measured.
Description: 6th International Simposium on Ferroic Domains and Mesoscopic Structures (ISFD-6), Nanjing, 29 May-2 June 2000
URI: http://hdl.handle.net/10397/25289
ISSN: 0015-0193
EISSN: 1563-5112
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