Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/25271
Title: UV laser micromachining of piezoelectric ceramic using a pulsed ND:YAG laser
Authors: Zeng, DW
Li, K
Yung, KC
Chan, HLW 
Choy, CL 
Xie, CS
Issue Date: 2004
Publisher: Springer
Source: Applied physics. A, Materials science & processing, 2004, v. 78, no. 3, p. 415-421 How to cite?
Journal: Applied physics. A, Materials science & processing 
Abstract: UV laser (£f = 355 nm) ablation of piezoelectric lead zirconate titanate (PZT) ceramics in air has been investigated under different laser parameters. It has been found that there is a critical pulse number (N = 750). When the pulse number is smaller than the critical value, the ablation rate decreases with increasing pulse number. Beyond the critical value, the ablation rate becomes constant. The ablation rate and concentrations of O, Zr and Ti on the ablated surface incre
URI: http://hdl.handle.net/10397/25271
ISSN: 0947-8396
EISSN: 1432-0630
DOI: 10.1007/s00339-002-1956-9
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