Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/24864
Title: Analog detection device in a sub-micron linear encoder based on a fibre-optic interferometer with a 3×3 coupler
Authors: Chow, HW
Cheung, NC 
Jin, W 
Issue Date: 2010
Publisher: Inst Engineering Technology-Iet
Source: IET science, measurement and technology, 2010, v. 4, no. 5, p. 237-245 How to cite?
Journal: IET Science, Measurement and Technology 
Abstract: This study demonstrates a high-resolution linear incremental encoder for high-precision feedback control loop. This novel encoder uses a fibre-optic interferometer with a 3×3 coupler and a signal comparator circuit to generate quadrate encoding output signals for the displacement measurement of the moving object. The encoder should be able to achieve a resolution of 95.5 nm and a measurement accuracy of ±0.38 μm.
URI: http://hdl.handle.net/10397/24864
DOI: 10.1049/iet-smt.2010.0011
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