Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/24726
Title: Highly oriented SrTiO3 thin film on Si deposited by magnetron sputtering
Authors: Wang, Y 
Chan, HLW 
Cheng, YL
Choy, CL
Issue Date: 2003
Publisher: A V S Amer Inst Physics
Source: Journal of vacuum science and technology a : vacuum, surfaces and films, 2003, v. 21, no. 3, p. 825-826 How to cite?
Journal: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 
URI: http://hdl.handle.net/10397/24726
ISSN: 0734-2101
DOI: 10.1116/1.1558551
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