Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/24318
Title: Preparation of thick PZT films on stainless steel substrates
Authors: Li, K
Chan, HLW 
Lee, KW
Choy, CL 
Keywords: Piezoelectricity
PZT
Sol-gel
Thick film
Issue Date: 2000
Publisher: Taylor & Francis
Source: Integrated ferroelectrics, 2000, v. 30, no. 1-4, p. 253-260 How to cite?
Journal: Integrated ferroelectrics 
Abstract: Lead zirconate titanate (PZT, PbZr0.52Ti0.48O3) films of thickness 22 μm have been deposited on stainless steel substrates by spin-coating a PZT solution containing PZT powder. The solution had a concentration of 1.2 M and was dispersed with PZT powder in a 1:1 powder/solution molar ratio. The films were rapidly heated to 400°C and annealed for 15 min, and then they were further annealed in an oven at 650°C for 30 min. The results of X-ray diffraction studies show that the films have a pure perovskite phase. The inter-diffusion of ions at the PZT/stainless steel interface was prevented by using a ZrO2 barrier layer. The films were found to have good ferroelectric and piezoelectric properties.
Description: 12th International Symposium on Integrated Ferroelectrics, Aachen, 12-15 March 2000
URI: http://hdl.handle.net/10397/24318
ISSN: 1058-4587
EISSN: 1607-8489
DOI: 10.1080/10584580008222274
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