Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/24222
Title: A task specific uncertainty analysis method for least-squares-based form characterization of ultra-precision freeform surfaces
Authors: Ren, MJ
Cheung, CF 
Kong, LB
Keywords: form characterization
freeform surface
least-squares method
precision metrology
uncertainty analysis
Issue Date: 2012
Publisher: Institute of Physics Publishing
Source: Measurement science and technology, 2012, v. 23, no. 5, 54005 How to cite?
Journal: Measurement science and technology 
Abstract: In the measurement of ultra-precision freeform surfaces, least-squares-based form characterization methods are widely used to evaluate the form error of the measured surfaces. Although many methodologies have been proposed in recent years to improve the efficiency of the characterization process, relatively little research has been conducted on the analysis of associated uncertainty in the characterization results which may result from those characterization methods being used. As a result, this paper presents a task specific uncertainty analysis method with application in the least-squares-based form characterization of ultra-precision freeform surfaces. That is, the associated uncertainty in the form characterization results is estimated when the measured data are extracted from a specific surface with specific sampling strategy. Three factors are considered in this study which include measurement error, surface form error and sample size. The task specific uncertainty analysis method has been evaluated through a series of experiments. The results show that the task specific uncertainty analysis method can effectively estimate the uncertainty of the form characterization results for a specific freeform surface measurement.
URI: http://hdl.handle.net/10397/24222
ISSN: 0957-0233
EISSN: 1361-6501
DOI: 10.1088/0957-0233/23/5/054005
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