Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/24183
Title: A framework of a model-based simulation system for prediction of surface generation in fast tool servo machining of optical microstructures
Authors: Cheung, CF 
Lee, WB 
To, S 
Li, HF
Wang, SJ
Keywords: Fast tool servo machining
Model-based simulation
Optical microstructures
Optimization
Surface generation
Issue Date: 2007
Publisher: Scientific.Net
Source: Key engineering materials, 2007, v. 339, p. 407-411 How to cite?
Journal: Key engineering materials 
Abstract: The fabrication of high-quality optical microstructural surfaces is based on fast tool servo (FTS) machining. It makes use of auxiliary piezo-electric driven servos to rapidly actuate the diamond tool with a fine resolution and a sufficiently high bandwidth for machining optical microstructures with submicrometer form accuracy and a nanometric surface finish without the need for any subsequent post processing. However, the achievement of a superior mirror finish and form accuracy still depends largely on the experience and skills of the machine operators, acquired through an expensive trial-and-error approach to using new materials, new mircostructural surface designs, or new machine tools. As a result, this paper, a model-based simulation system is presented for the optimization of surface quality in the FTS machining of optical microstructures. Preliminary experimental work and the results are also presented.
URI: http://hdl.handle.net/10397/24183
ISSN: 1013-9826
EISSN: 1662-9795
DOI: 10.4028/0-87849-430-8.407
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