Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/24060
Title: Measuring ultra-precision freeform surfaces using a robust form characterization method
Authors: Cheung, CF 
Li, H
Kong, L
Lee, WB 
To, S 
Keywords: Advanced optics
Form characterization
Freeform surfaces
Robust estimation
Ultra-precision machining
Issue Date: 2006
Publisher: Institute of Physics Publishing
Source: Measurement science and technology, 2006, v. 17, no. 3, p. 488-494 How to cite?
Journal: Measurement science and technology 
Abstract: Ultra-precision freeform surfaces are complex surfaces that possess non-rotational symmetry and are widely used in advanced optics applications. However, there is a lack of a surface characterization method that measures the form accuracy of the ultra-precision freeform surfaces with micrometre to sub-micrometre form accuracy. Due to the high precision requirement of the ultra-precision freeform surfaces, this inevitably involves the outliers in the measured data that would significantly affect the accuracy and the performance of the form characterization method. Although some research work has been found in the development of the form characterization method, most workers have not considered the influence of outliers. It is vital to incorporate robust estimation in the surface characterization method for catering for the influence of outliers. In this paper, a robust form characterization method (RFCM) is presented to characterize the form accuracy of the ultra-precision freeform surfaces. A series of computer simulation and experimental analyses were undertaken to verify the RFCM. The theoretical results agree well with the simulation and experimental results.
URI: http://hdl.handle.net/10397/24060
ISSN: 0957-0233
EISSN: 1361-6501
DOI: 10.1088/0957-0233/17/3/S05
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