Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/24013
Title: Characterization of AZO and Ag based films prepared by RF magnetron sputtering
Authors: Miao, D
Jiang, S 
Zhao, H
Shang, S 
Chen, Z
Keywords: Ag
AZO
Infrared reflection
Multilayer thin film
RF magnetron sputtering
Issue Date: 2014
Publisher: Elsevier Ltd
Source: Journal of alloys and compounds, 2014, v. 616, p. 26-31 How to cite?
Journal: Journal of Alloys and Compounds 
Abstract: Ag, AZO/Ag, Ag/AZO and AZO/Ag/AZO films were prepared on glass substrates by radio frequency (RF) magnetron sputtering technology. The prepared films were systematically investigated by X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), UV-visible spectrophotometer, a four-point probe system and Fourier Transform Infrared Spectroscopy. The results indicated that Ag inner layer starts forming a continuous film at the thickness of 10 nm and Ag layer presents superior crystallization on AZO substrate than that on glass substrate. The continuous Ag inner layer film provided the highest average visible transmittance of 85.4% (AZO/Ag/AZO). The lowest sheet resistance of 3.21 Ω/sq and the highest infrared reflection rate of 97% in FIR region can be obtained on AZO/Ag (15 nm)/AZO film. The high infrared reflection property of the AZO/Ag/AZO coating makes it a promising candidate for solar control films.
URI: http://hdl.handle.net/10397/24013
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2014.07.105
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