Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/23836
Title: Piezoelectric coefficients of PZT thin films
Authors: Tsang, RCW
Kwok, KW 
Chan, HLW 
Choy, CL 
Keywords: Longitudinal piezoelectric coefficient d33
PZT films
Sol-gel
Transverse piezoelectric coefficient 631
Issue Date: 2002
Publisher: Taylor & Francis
Source: Integrated ferroelectrics, 2002, v. 50, p. 143-148 How to cite?
Journal: Integrated ferroelectrics 
Abstract: Longitudinal piezoelectric coefficient (d33) and transverse piezoelectric coefficient (e31) of sol-gel derived lead zirconate titanate (PZT) thin films have been measured, d33 was measured based on the converse piezoelectric effect using a single beam laser interferometer. Bending of the substrate caused by surface displacement of the PZT film was eliminated by clamping the substrate tightly to a large and rigid platform. e31 was measured based on the direct piezoelectric effect using a simple experimental setup. In the measurement, a rectangular PZT film sample (with substrate) was bent in such a way that a longitudinal strain was generated along the length of the sample. The induced current was measured using a lock-in amplifier. This method does not require any expensive equipment and special techniques for preparing the sample. Effects of lead loss and annealing temperature on the piezoelectric properties have been studied.
URI: http://hdl.handle.net/10397/23836
ISSN: 1058-4587
EISSN: 1607-8489
DOI: 10.1080/10584580215506
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