Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/23722
Title: Effects of frequencies of AC modulation voltage on piezoelectric-induced images using atomic force microscopy
Authors: Xu, CH
Woo, CH
Shi, SQ 
Wang, Y 
Keywords: Atomic force microscope
Modulation frequency
Piezoelectricity
Thin films
Issue Date: 2004
Publisher: Elsevier
Source: Materials characterization, 2004, v. 52, no. 4-5, p. 319-322 How to cite?
Journal: Materials characterization 
Abstract: Lead zirconate titanate (PZT) thin film is prepared by sol-gel method on Pt/Ti electrode/SiO 2/Si wafer. Local poling is performed on the PZT film using an atomic force microscope (AFM). The topography and piezoelectric-induced (PEI) images on the polarized PZT film are recorded using AFM at piezo-responsive mode, operated with an AC voltage at varying frequencies. The best PEI image was obtained at the frequency around 300 kHz. It is explained that the change of piezoelectric vibrations and input noise signals with the frequency of AC modulation voltage affects the intensity of PEI images.
URI: http://hdl.handle.net/10397/23722
ISSN: 1044-5803
DOI: 10.1016/j.matchar.2004.06.006
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