Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/23326
Title: Influence of processing conditions on the structure of strontium titanate thin films grown on SI by laser mbe
Authors: Zhou, XY
Miao, J
Lu, XB
Lee, PF
Dai, JY 
Chan, HLW 
Choy, CL 
Wang, Y 
Keywords: Epitaxy
Laser MBE
Strontium titanate
Thin film
Issue Date: 2006
Publisher: Taylor & Francis
Source: Integrated ferroelectrics, 2006, v. 86, no. 1, p. 109-116 How to cite?
Journal: Integrated ferroelectrics 
Abstract: Epitaxial SrTiO3 thin films have been deposited on Si (100) substrates by laser molecular-beam epitaxy. The experiments have confirmed that the use of Sr buffer layer is essential for making high quality SrTiO3 film. Apart from this, processing parameters including the deposition temperature and time for each layer also have significant influence on the crystallinity and roughness of SrTiO3. The thin films prepared under optimized conditions were found to have a pure perovskite phase, well crystallized and epitaxially aligned. The electrical measurements indicate that the SrTiO3 film has a capacitance effective thickness of less than 16.
URI: http://hdl.handle.net/10397/23326
ISSN: 1058-4587
EISSN: 1607-8489
DOI: 10.1080/10584580601085222
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