Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/22828
Title: Shear-mode PMN-PT piezoelectric single crystal resonator for microfluidic applications
Authors: Zhang, K
Choy, SH
Zhao, L
Luo, H
Chan, HLW 
Wang, Y 
Keywords: Microfluidic system
Piezoelectric resonator
PMN-PT single crystal
Shear mode
Issue Date: 2011
Source: Microelectronic engineering, 2011, v. 88, no. 6, p. 1028-1032 How to cite?
Journal: Microelectronic Engineering 
Abstract: We report on the integration of a PMN-PT single crystal-based piezoelectric resonator in a microfluidic system. In this experiment, the resonator was implanted in the microfluidic channel through a standard soft lithography process with its top electrode in contact with the flowing fluid. The results showed that, activated in shear mode, the resonator sensed changes occurring along the fluid-electrode interface and gave responses in the form of impedance resonance frequency shift. By measuring the frequency shift, changes in the fluidic property (e.g. viscosity) could be monitored. Examples are given to demonstrate the potential use of the system for cell detections.
URI: http://hdl.handle.net/10397/22828
ISSN: 0167-9317
DOI: 10.1016/j.mee.2011.01.072
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